Optical gauge for surface flatness measurement
CORNING
The UltraFlat system is used to measure flatness of photoblanks and photomasks throughout every stage of manufacturing and use, including substrate polishing, coating and patterning to analyze film stress, and verification.
UltraFlat system utilizes near-normal incidence interferometry, rock-solid structural design, state-of-the-art optical fabrication techniques and Tropel's renowned phase-shifting analysis software to deliver 20 nanometer measurement uncertainty.
The system is National Institute of Standards and Technology (NIST)-traceable and provides measurements that conform to SEMI standards. An automated photomask handling and measurement configuration is also available.
