Linear positioning stage 2000 µm, 0.15 N/µm, 150 V

piezoelectric2-axislong-travel

DSM's FlexFrame PiezoActuator™ products are flexure-guided piezoelectric actuators that use lever mechanisms to mechanically amplify the motion of piezo ceramics. The flexures in each mechanism are designed to provide stable motion guidance and to minimize the resistance that the frame might impart to the piezoelectric actuation. DSM designs the flexures to stay within the material's fatigue limit under standard operating conditions. DSM's FPA-2000E FlexFrame PiezoActuator(TM) was developed to satisfy requirements in wafer positioning for the semiconductor fabrication industry. The piezo actuator incorporates a preload for bi-directional motion and a titanium or stainless steel mechanical amplification frame. See the complete family of standard FPA designs at the associated Web link. Custom inquries are welcome, and we simply ask "What 'mission critical motion control' requirement can we help you with?"