Air filter SilverSet™

activated carbonfor chemical applicationspleated

SilverSet™ Chemical Filters for E2600 Housing Advanced scanner optics and resist protection Activated carbon media in inlet filter(s) prevents conversion of PGMEA to acetic acid, which can cause photoresist processing variation and material corrosion Asymetric filter configuration prevents conversion of HDMSO to TMS, which causes scanner lens contamination Hybrid filters containing highly-activated carbon plus advanced plymetric media removes a full range of contaminants including acids, bases and condensable organics 2-year filter lifetime at >99% removal efficiency for acids, bases and condensable organics in typical cleanroom photo bay conditions Pleated filter design in rigid, deep frame optimizes active component surface area for maximum utilization and efficiency Serial filter layout with interstack sampling ports provides multiple levels of protection and allows for filter performance monitoring and early break-through detection Chemical filtration performance validated by Entegris Analytical Services, providing assurance that all filter performance claims are verified with supporting data.