Linear motor driven XY stage
FEINMESS DRESDEN

Feinmess XY-stages are optimized for ultimate compactness. The motors are inside the stages and enable easy integration in the system. Different sizes with travels of 25 mm to 200 mm, different drive concepts and aperture versions are available. Selected systems can be prepared for ultra-high vacuum and non-magnetic applications.

This XY-Stage is available with 100mm travel and piezo linear motor for high speed applications.

Technical Data KDT 180
Travel [mm] 100 x 100
Aperture [µm] 115
Repeatability [counts] ± 2
Relative deviation from straightness/flatness - over total length [µm] ± 2
Max. speed* [mm/s] 200
Max. acceleration* [m/s2] 10
Permissible loads
Fx [N] 10
Fy [N] 10
Fz [N] 50
Weight [kg] 3.0