Feinmess launches a new long-travel Nanometer Stage

Feinmess Dresden has extended its product line of precision stages by an innovative Piezo-leg-drive of the Swedish company PiezoMotor Uppsala AB.

The Nano-positioning stage MT84-25-PM is now available for travels of up to 50mm. The Piezo-leg portfolio includes also a compact aperture stage and a miniature stage with a travel of 10mm.

The systems can be equipped with different industrial encoders having a resolution of up to 5nm. Therewith, a repeatability of +/- 10 nm can be achieved. Applications, which had been only reserved for piezo elements with PZT-ceramics, are now possible with even longer travels.

Upon request, all systems can be prepared for high-, ultra-high-, vacuum- , and non-magnetic applications.

Custom-tailored to the requirements of the Piezo-leg-stages, a controller has been developed that is cut out for sophisticated applications.


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