The MT-Series micro stages are characterized by a very compact design. Integrated motor concepts allow space-saving solutions. Furthermore, outstanding parameters in straightness and accuracy can be achieved. Selected linear stages are available as compact 3-axis versions and can be prepared for ultra high vacuum and non-magnetic solutions. Travel [mm] 10 Accuracy [µm] 3 Repeatability [counts] ± 2* Deviation from straightness / flatness - over total length [µm] ± 0,5 Max. speed [mm/s] 5 Permissible load / Fz [N] 5 Weight [g] ca. 10