Micro-positioning system
FEINMESS DRESDEN

The MT-Series micro stages are characterized by a very compact design. Integrated motor concepts allow space-saving solutions. Furthermore, outstanding parameters in straightness and accuracy can be achieved. Selected linear stages are available as compact 3-axis versions and can be prepared for ultra high vacuum and non-magnetic solutions.

Travel [mm] 10
Accuracy [µm] 3
Repeatability [counts] ± 2*
Deviation from
straightness / flatness
- over total length [µm] ± 0,5
Max. speed [mm/s] 5
Permissible load / Fz [N] 5
Weight [g] ca. 10

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