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Direct-drive rotary indexing table
IntelLiDrives, Inc.

Low Profile Direct Drive Rotary Servo Table

Planar ServoRing Series

Compact package and superior design

The design of the Planar ServoRing™ rotary stages was optimized to minimize stage height. The low profile of the stage reduces total system working height. Angular contact bearings are used to maximize performance with respect to wobble, moment stiffness and friction. Planar ServoRing™ stage has large clear center aperture that can be used for air or wire line feed-through or beam delivery

Brushless Direct Drive maximizes positioning performance of the Planar ServoRing™ by utilizing three phase planar brushless motor technology. “Lo-Cog” magnetic design assures smooth rotation and dynamic performance

Accurate Positioning

Performance is assured with 18,000 lines encoder that results in 0.1 arc-sec positioning resolution. The motor and rotary encoders are directly coupled to eliminate coupling backlash. The low inertia and zero backlash make Planar ServoRing™ the ideal solution for applications requiring frequent directional changes.


Features
Large center aperture
Low profile
Unlimited rotation
High torque motors
Precision bearings
High resolution feedback

Specifications (model and system dependent)

torque 40 to 120 Nm
resolution up to 0.1 arc-sec
repeatability 0.5 arc-sec
accuracy 10 arc-sec
run-out 5 microns
table height 42 mm
table OD 150, 200, 300 mm
center aperture 40, 55, 110, 145 mm

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