Motor-driven rotary table PSR-200MHS
horizontalfor machine toolscompact

motor-driven rotary table
motor-driven rotary table
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for machine tools
Other characteristics
compact, direct-drive, brushless

200 mm (8 in)


Planar ServoRing rotary tables provide superior angular positioning and are designed to eliminate backlash, friction and wear problems associated with worm, gear and belt drives. Low maintenance and high throughput characteristics of the Planar ServoRing stage yields the lowest total cost of ownership. Compact package and Superior design of the Planar ServoRing rotary stages was optimized to minimize stage height. The low profile of the stage reduces total system working height. Angular contact bearings are used to maximize performance with respect to wobble, moment stiffness and friction. ULTRATHIN ServoRing stage has large clear center aperture that can be used for air or wire line feed-through or beam delivery. Planar ServoRing utilizes direct drive three phase planar brushless motor technology. There are no brushes to replace and no gear trains or belts to maintain. “Lo-Cog” magnetic design assures smooth rotation and dynamic performance. The low inertia and zero backlash make Planar ServoRing the ideal solution for applications requiring frequent directional changes. Accurate Positioning is assured with MHS type contact-less encoder. The motor and rotary encoders are directly coupled to eliminate coupling backlash. MHS encoder allows to achieve 5 arc-sec accuracy for PSR300 and 8 arc-sec accuracy for PSR200. Semiconductor assembly Electronics assembly Precision machine tools Robotic handlers Wafer processing Automation
*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.