Clean oven for FPD production
80 - 250 °C | CCBS series
Koyo Thermos Systems
High clean and damage free
Simplified structure of the equipment, high uptime, and energy saving with the newly developed heat reuse unit
The flexible layout is available with such function units as the single substrate transfer type, and/or the cooling rack.
It is suited for every process of substrates such as sampling some of them after baking and/or skipping the baking process etc.
Our original expertise has resolved such a process to generate sublimation as post baking of the photo resist.
