high-resolution x- and z- axes positioning machines in compact stage-design wit top- and bottom plate offer a total motion range from 38µm up to 1500µm
They are ideally suited for nm-precise positioning of optic components such as mirrors and supplier of laser diodes, for adjustment and mounting in semi-conductor technologies and electronics, for applications in measurement technologies and quality assurance as well as for microbiology.
The systems of these series are available in OEM, vacuum and low temperature configurations. Optionally they can be equipped with strain gauge, LVDT or capacitive industrial position sensors - depending on the system configuration - to achieve very accurate repeatability.
series PU
positioning systems, which are universally mountable in a variety of installation positions with a total motion range up to 100µm
