Optical interferometer Verifire™ XL

lasercompactFizeau

Large aperture, small footprint – The Verifire XL is a turnkey interferometer workstation for easy testing of plano optics up to 300 mm diameter. This fully integrated system is easy to use, with a heavy duty tip/tilt stage that provides repeatable part placement without the need for custom fixturing. The compact footprint, with built-in vibration isolation and controller monitor stand, requires minimal production floor space. Stand-alone large aperture workstation for measuring plano optical surface form up to 12 inches (300 mm) in diameter such as mirrors, windows, semiconductor wafers, wafer chucks and blocked flats. • 12" (300 mm) aperture in downward-looking orientation for easy part handling and alignment • Turnkey, self-contained system including interferometer mainframe, passive vibration isolation system, test part alignment stage and 1/15th wave PVr transmission flat (TF) • Compact footprint minimizes consumption of valuable floor space • Integrated vibration isolation and QPSI™ technology for reliable measurements in production environments