Wafer handling robot

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4 companies | 5 products
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SCARA robot
SCARA robot
YK-XG series

Payload: 5 kg
Reach: 250, 350, 400 mm
Repeatability: 0.01 mm

... maintenance features The covers on the YAMAHA SCARA robot YK-XG series can be removed from the front or upwards. The cover is separate from the cable so maintenance tasks are easy. On ordinary robots ...

pick-and-place robot
pick-and-place robot

... convey the wafers in and out of the machine, so no conversion is needed for different wafer sizes and a gentle transport is guaranteed. An integrated camera system detects the position, defects and ...

delta robot
delta robot
SIAX D3 500

Payload: 2 kg
Reach: 500 mm
Repeatability: 0.1 mm

Power supply: 220V single phase. Installed power: from 1,2 to 1,5 KW. Humidity: max 95%. Speed: up to 120 cycles/minute. Degrees of freedom: 3+2 (wrist + tilt).

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Sipro srl
delta robot
delta robot
SIAX D3 700 HS

Payload: 2 kg
Reach: 700 mm
Repeatability: 0.1 mm

Power supply: 220V single phase. Installed power: from 2,1 to 2,7 KW. Humidity: max 95%. Position repeatability: 0.1 mm. Speed: up to 150 cycles/minute. Degrees of freedom: 3+1(wrist).

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Sipro srl
SCARA robot
SCARA robot
IWH Series 1

Payload: 0 kg - 1 kg
Repeatability: 0.02 mm

Series 1 robots are designed for wafer handling. The modular system allows the combination of various base bodies, from 7" to 21" Z stroke, with a large number of different arm modules ...

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