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- Wafer handling robot
Wafer handling robot
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Payload: 5 kg
Reach: 250, 350, 400 mm
Repeatability: 0.01 mm
... maintenance features The covers on the YAMAHA SCARA robot YK-XG series can be removed from the front or upwards. The cover is separate from the cable so maintenance tasks are easy. On ordinary robots ...
... convey the wafers in and out of the machine, so no conversion is needed for different wafer sizes and a gentle transport is guaranteed. An integrated camera system detects the position, defects and ...
Payload: 2 kg
Reach: 500 mm
Repeatability: 0.1 mm
Power supply: 220V single phase. Installed power: from 1,2 to 1,5 KW. Humidity: max 95%. Speed: up to 120 cycles/minute. Degrees of freedom: 3+2 (wrist + tilt).
Sipro srl
Payload: 2 kg
Reach: 700 mm
Repeatability: 0.1 mm
Power supply: 220V single phase. Installed power: from 2,1 to 2,7 KW. Humidity: max 95%. Position repeatability: 0.1 mm. Speed: up to 150 cycles/minute. Degrees of freedom: 3+1(wrist).
Sipro srl
Payload: 0 kg - 1 kg
Repeatability: 0.02 mm
Series 1 robots are designed for wafer handling. The modular system allows the combination of various base bodies, from 7" to 21" Z stroke, with a large number of different arm modules ...
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