Robotic handling equipment WHM

integratedfor wafers

The WHM WaferHandling.Module developed by Adenso with a central vacuum chamber and integrated WHR WaferHandling.Robot is optimised for the handling of substrates/carriers in the high vacuum. Our WHM WaferHandling.Module operates completely independently, is space-saving and can be easily docked onto your running process stations already completely functional – your Vacuum.Cluster tool is ready! WHR WaferHandling.Robot Vacuum chamber with 4 to 8 ports LLM LoadLock.Modules STEALTH.CARRIER WAM WaferAlignment.Modules FLP FOUP300 VAC.LOADPORT The Adenso WHR WaferHandling.Robot is the heart of our modular VAC.ROBOTICS platform. The Adenso.WHR undertakes tasks for handling sensitive and large substrates in vacuum robotics (industrial VacBot) and is optimised for maximum load capacity and large ranges. The simple arm geometry allows small gate valves and compact handling rotation areas. Your advantages at a glance RANGE: Largest traversing distances – maximum flexibility PAYLOAD: Maximum loading capacity – unlimited substrate selection GATE VALVE: Intelligent kinematics – smallest gate valve FOOTPRINT: Space-saving kinematics – smallest installation space COMPLEXITY: Keep it simple with Adenso – save space and money!