Density monitoring system LambdaPro® OMS

for the electronics industrylaseroptical

Denton Vacuum’s LambdaPro® OMS enables you to maximize yield by controlling the deposition during a run and achieving repeatable performance from run to run. The LamdaPro OMS monitors the properties of an optic in real time as it is being deposited, using the reflection of – or the transmission through – a substrate or witness chip. This direct monitoring of a substrate or indirect monitoring of a witness chip lets you terminate the deposition at the desired optical thickness. The LambdaPro® Optical Monitoring System is highly configurable to meet your exact specifications and will result in increased production yields on multi-layer optics. This solution offers complete integration into Denton’s computer-controlled system, providing both a high signal scan rate and analog to digital conversions, while working in both reflection and transmission modes. Anti-reflectance and high-reflectance coatings Laser facets Optical sensors and filters Band pass filters Infrared filters and coatings Neutral density filters Metallization Beam splitters The LambdaPro® OMS provides dramatic results in optical thickness and uniformity for multiple film stacks, while providing keen insight into the index being achieved in real time, along with film stoichiometry. Since our OMS is measuring optical thickness and not physical thickness, this solution is excellent for complex, multilayer optical stacks.