UHV vacuum chamber VC M1000²

for surface analysis

The VC M1000² is based on our new modular chamber system. The system consists of individual, fully milled aluminum modules with a depth of 500mm. Thus the length of the chamber can be variably set in 500mm steps. This system has great benefits: ✓ Flexible length of max. 3 meters ✓ Very fast delivery because only door and back wall must be supplemented ✓ Low-cost ✓ Low-weight ✓ Low desorption of the aluminium, therefore also suitable for high vacuum ✓ Colour of your choice possible by anodising ✓ Highly clean processes possible, e.g. in the semiconductor field ✓ Easy operation ✓ No welding required, parts can be easily attached ✓ Easy attachment to the existing division bars Vacuum chamber specifications Internal dimensions Length: 1000 mm (modular in 500 mm steps) Width: 1000 mm Height: 1000 mm Volume approx. 1000 liters Connections 2 x KF 16 6 x KF 40 1 x ISO K 63 1 x ISO K 160 Additional flanges possible in any position Door Hinged door with sight glass Diener electronic not only offers pioneering solutions in vacuum chambers, but also: Low pressure plasma systems for surface treatment Atmospheric pressure plasma systems for surface treatment Parylene coating systems Complete vacuum systems and equipment for a wide range of applications Test inks for determining surface tension Plasma indicators to prove successful plasma treatment Plasma generators