Vacuum rotary union WB-06111

for chemicalsfor gashigh-purity

Product Overview
Single-passage rotary union designed for semiconductor applications, capable of operating at temperatures down to -292 °F (−180 °C). The unit features a specialized assembly for use in vacuum environments where outgassing and leakage to atmosphere must be prevented. Constructed for cleanroom compatibility and chemical/gas media handling.

Key Features

• Single passage design
• Operates down to -292 °F (−180 °C)
• Specialized vacuum assembly to minimize outgassing and prevent leakage to atmosphere
• Cleanroom-compatible construction
• Stainless steel construction

Technical Details

• Industry: Semiconductor
• Media type(s): Chemical, Gas
• Environment: Cleanroom / Vacuum application
• Material: Stainless steel
• Maximum pressure: 100 PSI (7 bar)
• Maximum speed: 30 RPM
• Number of passages: 1
• Passage size: 0.188" (4.8 mm)
• Through bore: None
• Diameter: 2.880" (73.2 mm)
• Length: 2.150" (54.6 mm)

Related Projects / Industry

• Related industry: Semiconductor
• Related media types: Chemical, Gas

Specifications / Technical specifications

• Model / Reference: WB-06111
• Configuration: Single passage rotary union
• Temperature capability: down to -292 °F (−180 °C)
• Pressure rating: up to 100 PSI (7 bar)
• Speed: up to 30 RPM
• Passage size: 0.188" (4.8 mm)
• Number of passages: 1
• Through bore: None
• Outer diameter: 2.880" (73.2 mm)
• Overall length: 2.150" (54.6 mm)
• Material: Stainless steel
• Intended environment: Cleanroom / vacuum applications (low outgassing, leak containment)