XY stage EZ-0730

tilt2-axisprecision

Intelligent design gives the EZ-0730 stage maximum rigidity and excellent repeatability, minimizing axis crosstalk. Built-in features: Impulse decoupling to minimize crosstalk even at high accelerations. Weight optimization by using carbon for the lower slide. Use of carbon structures with thermal expansion close to 0 to minimize harmful temperature effects. Extremely rigid chuck due to integrated flat 11-zone vacuum clamping device with high-precision tip/tilt adjustment using sophisticated pressure membrane technology. Minimization of disturbance forces emanating from the energy chain due to novel drag chain concept. Ironless drives and high-precision scales (Heidenhain LIP6 G0). The machine bed is made of granite. The axes can be customized according to the customer’s requirements