Transport conveyor system

conveyorautomated

With our automated roller conveyor transport system for cleanrooms, manual wafer transportation in semiconductor fabs is now a thing of the past. Automated material transport to the process system saves valuable operator time, reduces throughput times and therefore improves overall production efficiency. Intelligent conveyor system for the semiconductor industry The cleanroom-compatible roller conveyor conveys different types of transportation boxes such as FOUPs, SMIF pods, HA200 boxes, open wafer cassettes and customer-specific wafer boxes. Arranged in zones, the separately actuated drive motors of the roller conveyor transport system guarantee collision-free automated transportation. Furthermore, the system can accelerate or decelerate the transported goods at different speeds in the sections. To ensure that the drive side is synchronized with the passive rollers, the rollers are connected to hollow shafts at regular intervals. The system’s versatile combination of line, lift, and rotating elements enables the implementation of highly customized wafer transport solutions in semiconductor fabs. It provides excellent options, particularly for maximizing limited space.The transport system can integrate multiple production levels of a fab. By incorporating additional work steps such as reading carrier IDs and wafer IDs, mapping, and aligning wafers into the transportation process, it significantly saves time along the transport route. Lastly, a special feature of the conveyor system for cleanrooms is the simple and flexible control via integrated micro-controllers.