3D measurement system MicroProf® FEfor wafers
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Characteristics
- Technology
- 3D
- Measured material
- for wafers
Description
The FRT MicroProf® FE is FormFactor’s standard, fully automated 2D/3D wafer metrology tool. It combines the capabilities of the established MicroProf 300 with a wafer handling system within an Equipment Front End Module (EFEM). With fully SEMI-compliant metrology solutions and almost maintenance-free hardware components, providing high throughput inspection, the MicroProf FE is the metrology solution in any front end HVM fab.
Besides the standard configuration, the FRT MicroProf FE can be equipped with numerous additional features, which can also be retrofit later.
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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.