Semiconductor inspection gas monitoring equipment D-ReX PoS²

for industrial usefor process monitoringfor detection

Overview
The D-ReX PoS² is a compact gas detection system designed for semiconductor manufacturing environments. It integrates an internal pump to draw sample gas at the point of sampling (PoS) from distances up to ~30 m and supports wall or DIN‑rail installation. Connectivity options include Power over Ethernet (PoE), 4–20 mA and Modbus (RS-485).

USPs

• Tool‑free service: Front panel opens without tools for fast access to sensor cartridge and pump mechanism.
• Remote sampling: Integrated pump with sample‑line capability for constrained spaces and distributed sampling points.
• Flexible integration: PoE, analog 4–20 mA and Modbus (RS-485) for easy connection to higher‑level control systems.

Features

• Optional line integrity monitoring
• Large 2.4" TFT color display for gas ID, concentration and device status
• Three internal freely programmable single‑pole changeover relays
• Communication: Ethernet (PoE), 4–20 mA, Modbus (RS-485)

Designed for semiconductor fabs
The device supports sampling from pipelines, gas distribution systems, storage areas, scrubbers and cleanrooms. For gases requiring pyrolysis an optional Py‑ReX module is available. Sensor cartridges are preconfigured and replaceable; the sensor cassette and pump electronics remain for reuse when replacing wear parts.

Information & operation
The 2.4" color display presents gas identity, measured concentration, device status and faults in plain text. Three internal relays can be programmed to trigger external alarms or safety actions. Networked operation is supported via PoE-enabled LAN (10/100 Mbit/s) and Modbus (RS-485); analog output is provided via 4–20 mA.

Detectable semiconductor process gases (typical)
Ammonia (NH3), Hydrogen chloride (HCl), Hydrogen fluoride (HF), Hydrogen (H2), Silane (SiH4), Dichlorosilane (DCS), Arsine (AsH3), Phosphine (PH3), Diborane (B2H6), Hydrogen selenide (H2Se), Germane (GeH4), Chlorine trifluoride (ClF3), Fluorine (F2), Ozone (O3), Hydrogen bromide (HBr), Hydrogen cyanide (HCN), Hexamethyldisilazane (HMDS), Tetraethyl orthosilicate (TEOS).

Technical specifications

• Model: D-ReX PoS²
• Sampling: integrated pump with sample‑line capability (up to ~30 m)
• Installation: wall-mounted or DIN‑rail
• Service: tool‑free front access; tool‑free replacement of sensor cartridge and pump mechanism
• Sensors supported: electrochemical, catalytic, infrared, PID (preconfigured sensor cartridges)
• Display: 2.4" color (TFT)
• Relays: three internal freely programmable relays (single‑pole changeover)
• Analog output: 4–20 mA
• Digital communication: Modbus (RS-485)
• Network / Power: Power over Ethernet (PoE), Ethernet 10/100 Mbit/s
• Optional: Py‑ReX pyrolyzer module; optional line integrity monitoring