LED inspection system C15740-01photoluminescenceautomaticmeasurement
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Characteristics
- Technology
- LED, photoluminescence
- Operational mode
- automatic
- Type
- measurement
- Applications
- for production
Description
MiNY PL is an inspection system for micro LED wafers using the photoluminescence (PL) measurement method.
MiNY is a registered trademark of Hamamatsu Photonics K.K. (China, EU, Japan, Taiwan, UK).
Specifications
Supported wafer size - 100 mm (4 inches) or 150 mm (6 inches) (other sizes negotiable)
Measurement time -
Approx. 12 minutes
(Objective lens 10×, PL measurement, 4 inch wafers)
PL measurement wavelength - R, G, B
Spatial resolution - 1 μm/pixel (standard mode), 0.5 μm/pixel (high resolution mode)
Measurement items - Shape abnormality, PL intensity, PL wavelength
External dimensions / weight - 2000 mm (W) × 1878 mm (H) × 1130 mm (D) / Approx. 1800 kg
Clean room - Compatible
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Semiconductor manufacturing support systems
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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.