Glass surface inspection system GI5400

contamination

Glass plate inspection system for contamination control when manufacturing small and medium sized LCD and organic EL panels. Proprietary Hitachi technology allows front surface / back surface separate detection for thin glass plates. High reliability delivers high detection sensitivity, high-speed inspection and high-magnification observation of contaminants. Ideal for controlling contamination in panel manufacturing processes. • Supports sheet glass Glass thickness: 0.3 mm - 0.7 mm; max. glass plate size: 1300 mm × 1500 mm • Accurate front and back surface separate detection Front/back separation factor: 150 (front surface: φ0.3 µm; rear surface: φ50.0 µm; bare glass thickness: 0.7 mm) • High detection sensitivity Surface contaminants φ0.3 µm • High speed inspection 1300 mm × 1500 mm in 90 seconds (2-head optical system, φ1.0 µm high-speed mode) • Contaminants can be viewed on a monitor at high magnification