Particle detection system PD Xpadion

Next-generation inspection platform to meet future needs PD-Xpadion is the latest generation of the HORIBA Particle Inspection product line. Based on an innovative modular platform design, PD Xpadion is the right tool to meet current and future needs of Mask & Pellicle inspection in the lithography and mask production processes. Fab automation, combined with a suite of HORIBA’s core technology, allow users to expand the PD Xpadion system to include not only particle inspection and detection, but also particle characterization by Raman analysis, pellicle film thickness and uniformity, and pellicle health monitoring tools. Features Adjustable detection sensitivity by utilizing a combination of optical systems OHT, EFEM, multi-port, multi-slot adaptation Ability to reanalyse inspection data for faster inspection recipe optimization Integration options with other HORIBA sensor products like Raman spectroscopy and Ellipsometry False detection reduction function Innovative software with improved usability