quadrupole mass spectrometer / for the semiconductor industry / for electronic components / automated
EDA 407

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quadrupole mass spectrometer quadrupole mass spectrometer - EDA 407


  • Type:

    quadrupole mass

  • Field:

    for the semiconductor industry, for electronic components

  • Other characteristics:

    automated, gas, for quality control


Electronic Device Analyzer
The EDA 407 is especially designed to comply with the increasing requirements of the electronic device industry for product monitoring and quality control of small hermetically sealed electronic components.

The high-performance quadrupole mass spectrometer for humidity analysis in electronic devices is available with customized sample holders and breaking chambers and is individually adjustable for devices with various dimensions.

Humidity analysis for small hermetically sealed electronic components

High-performance quadrupole mass spectrometer for quality control of electronic devices

Detection limit for water <500 ppm for volumes 10 - 500 µl

Qualitative and quantitative analysis of gas inclusions inside the housing of electronic devices from ppm to 100%

Fully automated data analysis