XYZ stage

linearmotorized3-axis

This KML customized LinearMotorSystem was designed for maximum complex Pick and Place tasks, with which movements are necessary in three axles. The main requirements of the customer were: compact dimensions high dynamics to achieve short cycle times high system and repeatability within nanometer range resistant to high temperature of the system over a certain time interval the sag of the Z-axis execution must be prevented in case of a voltage failure clean room suitable version execution of the function and quality assurance by the supplier Solution To meet the requirements of the product concept catalogue the construction was arrange as follows: special geometrical dimensions structure by FEM (finite elements method) construed and optimized use of particularly coated composite materials use of clean room suitable materials and/or coatings temperature-compensated length measuring systems high performance linear motors with small heat dissipation magnetic mass balance in the Z-axis IKO ultra precision linear ways with clean room grease filling work piece holding by compressed air and evacuated system