LGO heaters achieve high accuracy in low-temperature heat treatments.
The light-gauge wire unit heaters are used for semiconductor diffusion furnaces.
The Moldatherm LGO heaters are lightweight, high-speed temperature rising and falling type unit heaters using ceramic fiber thermal insulating materials and have been developed to carry out highly accurate low-temperature heat treatments particularly in semiconductor diffusion furnaces. Since the heater wires are thinner than those of the Moldatherm heaters, further less heat is stored and therefore higher-speed temperature rising and falling are enabled. Target temperatures become stable in the shorter time, soaking performance is high, and heat treatment accuracies in low-temperature zones are outstanding.