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Diffusion furnace heating element LGO series
ceramic fiber

diffusion furnace heating element
diffusion furnace heating element
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Characteristics

Type
for diffusion furnaces
Material
ceramic fiber
Maximum temperature

1,100 °C, 1,150 °C (2,012 °F)

Description

LGO heaters achieve high accuracy in low-temperature heat treatments. The light-gauge wire unit heaters are used for semiconductor diffusion furnaces. The Moldatherm LGO heaters are lightweight, high-speed temperature rising and falling type unit heaters using ceramic fiber thermal insulating materials and have been developed to carry out highly accurate low-temperature heat treatments particularly in semiconductor diffusion furnaces. Since the heater wires are thinner than those of the Moldatherm heaters, further less heat is stored and therefore higher-speed temperature rising and falling are enabled. Target temperatures become stable in the shorter time, soaking performance is high, and heat treatment accuracies in low-temperature zones are outstanding.
*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.