Magnetic Rotor Suspension / Integrated Frequency Converter
Accuracy, precision and reliability those are the features of these magnetically-levitated turbomolecular pumps. High pumping speed and gas throughput for faster pump down time improve equipment cycle times. With its fully integrated converter and power supply, conventional rack-mounted controller and interconnecting cables are no longer necessary..
Outlet connection: - DN 16 ISO-KF
Pumping speed (N₂): - 365 l/s
Ultimate pressure: - 1 x 10⁻¹⁰ mbar