XRD diffractometer Wafer 200

laboratory

Wafer XRD 200 is an ultra-fast, high-precision automated system for wafer sorting based on crystal orientation, and wafer geometry parameters with a multitude of additional options. Overview Wafer XRD 200 is your fully automated high-speed X-ray diffraction platform for wafer production and research as you have never seen it before. Wafer XRD 200 provides key data on a variety of essential parameters such as crystal orientation and resistivity, geometric features like notches and flats, distance measurements, and much more – within just a few seconds. Designed to fit seamlessly into your process line. Features and Benefits Ultra-fast precision with proprietary scan technology The method requires only one wafer rotation to gather all the necessary data to fully determine the orientation, which delivers high precision at a very low measuring time – in the range of a few seconds. Fully automated handling and sorting Wafer XRD 200 is designed to optimize your throughput and productivity. Full automation of handling and sorting and detailed data transmission tools, make it a powerful and efficient element in your QC process. Easy connectivity Wafer XRD 200’s powerful automation is compatible with both MES and SECS/GEM interfaces. It fits easily into your new or existing process. High precision, deeper insight Understand your materials like never before with Wafer XRD 200’s key measurements. Wafer XRD 200 measures: Crystal orientation Notch position, depth, and opening angle Diameter Flat position and length Resistivity The typical standard deviation tilt (example: Si 100) for the Azimuthal-scan is <0.003o, minimum <0.001o.