The OAV Air Bearing Bar is produced with profile design for easy retrofitting into existing applications or designing into new applications. It generates an evenly distributed film of gas between the surface and the substrate. Because of low gas viscosity, friction losses by viscous shearing therefore lead to the avoidance of mechanical contact. The combination of air pressure and vacuum allow the bearing bar to hold the substrate down while simultaneously lifting it from surface for ultimate precision and fly height. The fly height range of 20 to 120 microns maintains a stability of ±5 microns.
Size - 1250mm OAV Air Bar
Part Number - OAVCB6060
Input Pressure - 20.0 psi (137 kPa)
Input Max. Pressure - 40.0 psi (275.7 kPa)
Fly Height - 80 microns (0.0032 in)
Fly Height Range - 20 - 120 microns (0.0008 - 0.0047 in)
Stiffness - 0.04 N/micron
Height stability - ±5 microns
Flow Rate - 0.63 SCFM
Vacuum Flow - 0.43SCFM
OAV Air Bearing Air Bar Width - 60mm
OAV Air Bearing Air Bar Height - 57mm
OAV Air Bearing Air Bar Length - 1250mm
Housing Material/Finish - A6N01SS-T5 Aluminum Alloy / Blue Anodize
Porous Media Material - Carbon
Flatness - 0.025 mm (0.001 in)
Weight - 2.13 kg (4.7 lbs)