PVD deposition machine SP series
magnetron sputteringarc evaporationdiamond-like carbon

PVD deposition machine
PVD deposition machine
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magnetron sputtering, arc evaporation
Deposition type
diamond-like carbon
Other characteristics
vacuum, with rotating cathodes, short-cycle, online, high-precision
for the microelectronics industry, automotive, for photovoltaic applications, for conductive film, for electrode coating


DLC (Diamond Like Carbon Coating) coating equipment is widely used in engine parts, non-ferrous metal cutting tools, sliding seal parts, textile industry and other industrial fields. This series of equipment is suitable for a variety of DLC coatings, and can be equipped with filtered arc ion plating, unbalanced magnetron sputtering, PE-CVD and other combinations according to customer needs. It is suitable for automobile parts manufacturing, mechanical parts, molds, bearings, punching Drawing dies, molds, aerospace parts, etc. The “Interlayer Technology” DLC film developed by our company focuses on the intermediate layer to achieve good adhesion, wear resistance, high hardness, low friction coefficient, and low surface roughness, so that the DLC coating can obtain more superior performance. We successfully broke through the bottleneck of low-temperature film formation technology, allowing DLC coatings to develop in more fields.
*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.