Large Sample imaging
made Easy
Modular Large Area Optical Microscope UP-5000
6-in-1 Optical Profilometry Imaging Analysis.
Interferometer + Confocal + Spectral Film Thickness + Dark Field + Variable Focus + AFM + Raman
Versatile and Precise Metrology
The optical profilometer UP-5000’s technology, performance, resolution, and versatility creates a class of its own. Equipped with fast scanning, multiple imaging techniques and high resolution, the UP-5000 offers the best solution for large sample surface imaging.
High Speed Camera
Industry leading camera with 200 FPS. Quick sub nm precision Measurements.
Highest Z Resolution
Advanced latest generation encoders provide the best Z resolution independent of scanning distance or magnification used.
Modular Versatile Platform
The 300 x 300 mm high precision cross roller XY stage to fit any sample –wafers, devices, pellicles, components, coupons, etc.
Powerful Analysis Software
Precise, quantitative, and ISO-compliant analysis software for nanometer resolution studies.
Unlike Any Other Optical Microscope
The UP-5000’s has a 6-in-1 combination of many optical techniques on one platform. As a result, our optical microscope provides measurement of almost any kind of sample with nm resolution.
onfocal – Spinning Disk
Fastest area scan – OR scan surface in an instant
Highest XY resolution 3D optical profiler on the market. Rtec Instruments spinning disk confocal scanning techniques is far superior to point or laser confocal that require oscillatory motion to generate images. The use of thousands of rotating pin holes eliminate the out of focus light from being recorded on the image.