filter gas purifier / nitrogen
PS3-MT3 Series

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filter gas purifier / nitrogen filter gas purifier / nitrogen - PS3-MT3 Series


  • Type:


  • Other characteristics:


  • Air flow:

    Max.: 5 l/min (1.3 us gal/min)

    Min.: 0 l/min (0 us gal/min)


Research has shown that gas purification ensures consistent and repeatable process performance for semiconductor device manufacturing. Point of Use Purification isolates critical process areas from house gas distribution systems and protects against gas purity upsets and cross-contamination.

The MonoTorr purifiers provide essential purification for Nitrogen and Rare Gases at flow rates up to 5 slpm.