Vertical automatic storage system

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Overview
Automated high-density storage solution for semiconductor production, designed to maximize vertical space utilization and integrate with fab material handling systems.

Key features

• Rapid deployment with automated material level teaching and testing
• High-density storage maximizing floor and vertical space
• Designed for 300mm wafer fabs
• Compatible with ARV, OHT, OHS and manual processes
• Integration with shop floor material management systems
• Cleanroom compliance: ISO14644-14, SEMI S2 and ESD standards

Stocker — Application introduction
Automated storage and inventory management solution for semiconductor production lines, enabling inline buffering and secure handling of wafers and carriers.

Applies to

• High-density storage and full use of vertical space
• Fast cycle times and responsive material flow
• Integration into shop floor material management systems
• Rapid implementation with automated level teaching and testing
• Compatibility with ARV/OHT/OHS/manual automated processes
• Compliance with Cleanroom ISO14644-14, SEMI S2 and ESD standards

E-RACK/TT — Function introduction

• On-line semiconductor storage supporting FOUP, CASSETTE, Magazine and Tray
• Interfaces with ARV and allows manual load/unload
• Standard SEMI software interface and modular design
• Compliant with Cleanroom ISO14644-14, SEMI S2 and ESD standards

Specifications

• Application: Automated material storage and management for semiconductor production
• Supported carriers: FOUP, CASSETTE, Magazine, Tray
• Compatibility: ARV/OHT/OHS and manual loading/unloading
• Cleanroom compliance: ISO14644-14
• Standards: SEMI S2 compliant
• ESD protection: Meets ESD standards
• Design: Modular
• Deployment: Rapid deployment with automated level teaching/test capability
• Target wafer size: 300mm
• Primary benefits: High-density storage and optimized vertical space utilization