Handling mobile robot platform

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Overview
The DUCO Mobile Cobot System is a mobile collaborative robot platform designed for semiconductor and cleanroom environments. It provides full-area safety integration, flexible charging options and demonstrator capabilities for automated material handling.

Key features

• Body dimensions: 950×600×700 mm
• Combined positioning accuracy: ±0.3 mm
• Navigation methods: SLAM & QR CODE
• Platform payload: 350 kg max
• Clean class compatibility: Class 1K

Application introduction (Mobile Cobots)

• Automated material handling at semiconductor wire edges and wafer processes
• Adapted to processes with loose or varying production cycles
• Suitable for single-piece or batch material flow scenarios
• Handles people flow and unrestricted material handling on the shop floor
• Supports environments with non-fixed equipment and frequent layout changes
• Applicable to wafer test, BG, WS, DB, WB and final TEST stages
• Complies with Cleanroom ISO14644-14, SEMI S2 and ESD standards

Charging System - Single battery station

• Storage capacity: 1/2 bin + 1 change bin
• Clean class: Class 1K
• Control system: PLC
• Data system: BCMS (optional)
• Battery replacement time: approx. 3 minutes

Charging System - Battery station

• Storage capacity: ≥ 5 bins
• Clean class: Class 1K
• Control system: PLC
• Data system: BCMS
• Battery replacement time: approx. 4 minutes

Battery management system
Integrated battery management monitors battery status, schedules replacements and logs battery operations to ensure continuous operation and traceability.

AGV (Electronic rack/Turntable) - Application introduction

• Automated material handling in semiconductor production lines
• Designed for short cycle times and combined multi-process workflows
• Suitable for point-to-point handling of large volumes, heavy loads and low docking accuracy
• Compatible with oven, burn-in, rack baskets and box carriers
• Complies with Cleanroom ISO14644-14, SEMI S2 and ESD standards

Applications

• Wafer polishing and transport
• SMT magazine loading and unloading
• Oven loading and unloading
• E-rack transshipment

Application Scenario

• Quality inspection and in-line handling tasks

Technical specifications

• Model: DUCO Mobile Cobot System
• Body dimensions: 950×600×700 mm
• Combined accuracy: ±0.3 mm
• Navigation methods: SLAM & QR CODE
• Platform loads: 350 kg max
• Clean class: Class 1K
• Control system: PLC
• Data system: BCMS (optional or standard depending on configuration)
• Single battery station — Storage: 1/2 bin + 1 change bin; Battery replacement time: ~3 minutes
• Battery station — Storage: ≥5 bins; Battery replacement time: ~4 minutes