- Machine-tools
- Finishing Machine
- Ceramic polishing machine
- SPEEDFAM NV/SA
Ceramic polishing machine FAM5 seriessheetautomaticsingle-sided
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Characteristics
- Machined material
- for ceramics
- Applications
- sheet
- Other characteristics
- automatic, single-sided, precision, chemical-mechanical
Description
- SpeedFam's 50-SPAW and 59-SPAW machines are automated single side mechanochemical polishing systems for bare silicon wafer processing. We transport ceramic mounting plates (loaded and unloaded with wafers) automatically. These systems are equipped with various advanced technologies such as a low thermal expansion polishing plates and cooling jackets, independent forced drive and precision pressure control for each process carrier.
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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.