- Machine-tools
- Finishing Machine
- Ceramic polishing machine
- SPEEDFAM NV/SA
Ceramic polishing machine DSM20B-5P-4Dautomaticdouble-sided
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Characteristics
- Machined material
- for ceramics
- Other characteristics
- automatic, double-sided
Description
The 20B-5P-4D is the latest specification for double side polishing of 300mm or 200mm wafers. With un-paralleled stability this system mass-produces 15 each 200mm wafers per batch, and 5 each 300mm wafers per batch. This is the ideal system for high flatness, low Nanotopography automation, maintenance and cost of ownership. The 20B05P-4D meets the most severe demands for precision and roll-off.
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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.