Rotary magnetron TC-Series

for ion sputtering

The TC-Series internal end blocks have a unique power-delivery technology in the most compact design available. The TC can handle targets up to 1500 mm and has a power rating of 40 kW DC or 80 kHz MFAC. SCI internal-mount end blocks have high reliability and a simple, easy-to-maintain design. The single-ended configuration reduces the number of rotary and static seals, one of the most common failure modes in rotary cathodes. Our unique water fill and drain feature allows improved target cooling and full draining of the target water on blow down. The design eliminates the possibility of galvanic corrosion inside the end block, which could lead to water leaks and short circuits. Sputtering Components’ TC internal-mount end blocks can be installed on any new coater or can easily replace planar systems. Features Patented power-deliver technology Unique target attachment method Durable, long-life rotary seals Most compact design available for standard, industrial targets Non-proprietary target design Fits standard target sizes Patented target water fill/drain feature Benefits Excellent reliability Easy to install Fast target change 2 hour annual maintenance; 3 hour total end block rebuild Very low maintenance cost Use targets from any vendor Excellent power capability with no inductive heating impact - no brush dust No galvanic corrosion