Side-mount magnetron MM Series

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The MM is our mid-size external-mount end block. It can handle targets up to 2500 mm (supported) and has a power rating of up to 100 kW DC or 80 kHz MFAC. The MM-Series external-mount end block uses the same patented technology as our MC-Series end block to deliver outstanding value, performance, and reliability in a compact design Features Customizable drive shaft length Compact and flexible design Easy access water seal cartridge Patented power-delivery technology Patented target water fill and drain Simple design for fewer parts Magnet bar externally adjusts to any angle Benefits Wider substrate coverage than internal end blocks Fits most chamber designs All utilities are external and remain attached during target changeover High-packing density; dual cathodes in 350 mm space Drive motors can be mounted mount up or down and inward, or outward High-power with no inductive heating impact - no brush dust Fast, simple, in-house maintenance Allows co-sputtering, tighter plasma coupling, and limits shield coating