Gas monitoring equipment PPM100

The PPM100 is a stand-alone controller/monitor for SRS residual gas analyzers. It measures partial pressures from SRS RGAs and total pressure from up to four capacitance manometers. Graphical output is available on a touch screen LCD display. The PPM100 includes 8-channel process control capability, four analog I/O ports, RS-232, USB and GPIB computer interfaces, and a web interface. Residual Gas Analysis The PPM100 is designed to monitor and control a single SRS RGA. A menu driven user-interface allows the operator to easily program RGA parameters from the front panel (i.e., no host PC is required). RGA data can be viewed as an analog scan, partial pressure vs. time, leak trend (with audio signal) or single mass readings. This data can also be linked to alarms, process control relays, and analog ports for closed-loop control of specific component gases. Screenshot 1 Analog I/O The PPM100 has four configurable analog I/O ports. These can be used as outputs to control auxiliary vacuum equipment such as heaters, actuators, ion sources, programmable logic controllers and throttle controllers. As inputs, up to four capacitance manometers can be monitored simultaneously. Data Logging Data from all gauges (and all analog inputs) is stored at a user-defined rate. Typical applications include capturing pump down or venting curves, monitoring mass flow controller signals during deposition processes, and monitoring temperatures and other time dependent variables during bakeouts or heat treatments.