Vacuum transmitter with combined piezo/Pirani sensor VSR

chemical-resistantfor aggressive media

The combination of piezo and Pirani sensor in the analog VSR vacuum transducer offers high precision and excellent resolution in the rough and fine vacuum range. MA4 – 4-20 mA output signal MV – 0-10V output signal Overview VSR vacuum transducer with Piezo/Pirani sensor: - Combination sensor Piezo / Pirani with extended measuring range 5.0 x 10-5 mbar - High accuracy over the entire measuring range including rough vacuum - Excellent reproducidility and reliability for stable production processes - Measurement independent of gas type in low vacuum - Fast response time of up to 18ms enable shorter clock cycles - Integrated metal facing for protection against contamination - UHV suitable due to metal sealed stainless steel measuring cell (He leakage rate <5e-10 mbar l / s) - Overpressure stability up to 10 bar - Optical status display by LED