Semiconductor metrology system EDGE APEX

Overview
Edge Series comprises three compact vision measurement systems designed for shop-floor metrology and dimensional verification of small precision components. The range supports repeatable, production-ready inspection where throughput and consistency are critical, enabling rapid feedback to production and quality control.

Key advantages

• Compact, production-ready footprint suitable for shop-floor use
• Repeatable measurements across operators, shifts and batches
• Three automation levels: manual (CORE), rapid 2-axis (VISTA) and full 3-axis CNC (APEX)
• Pattern recognition for automated feature location and image stitching for extended fields
• Programmable illumination and structured reporting with data export for SPC and quality systems

Three systems (inspection choices)
APEX

• Full 3-axis CNC measurement for controlled production inspection
• Motorised 6.5:1 zoom optics (7 positions) with motorised focus
• Adjustable sub-stage iris for flat and turned parts
• Programmable LED illumination, pattern recognition and image stitching
• GD&T measurement capability, structured reporting and M3 measurement software

VISTA

• Rapid automated measurement (3-axis CNC control, 2-axis measurement) for repeat inspection
• Low-distortion telecentric optics and motorised focus
• Large field of view for faster inspections, collimated sub-stage illumination
• Programmable LED illumination, pattern recognition and image stitching
• GD&T measurement capability, structured reporting and M3 measurement software

CORE

• Flexible manual measurement for production verification (manual stage control)
• Manual indexed 6.5:1 zoom optics and manual focus
• Iris-controlled sub-stage illumination for flat and turned parts
• Programmable LED illumination, pattern recognition and image stitching
• GD&T measurement capability, structured reporting and M3 measurement software

Measurement software
M3 (M-Series) software provides programmed inspection routines, automated feature detection and structured reporting to deliver repeatable dimensional verification in production environments.

• Create and run programmed inspection routines and batch inspections
• Store and recall measurement programs for repetitive tasks
• Pattern recognition for automatic feature location
• DXF import and digital comparison; data export for SPC and quality systems
• Store inspection results for traceability and Industry 4.0 integration

Applications

• Precision engineering: measurement of threads, gears, shafts, shoulders, grooves and small housings
• Electronics: miniaturised components, connector pins, solder pads, component spacing and PCB features
• Precision plastics & 3D printing: moulded connectors, housings, thin walls and cavity-to-cavity verification; image stitching for larger parts
• Medical devices: inspection of micro-features for catheters, stents, surgical device elements and miniature moulded parts

Caractéristiques / Spécifications techniques

• Denomination: Edge Series (three systems: APEX, VISTA, CORE)
• Measuring capacity (X / Y / Z): 200 x 100 x 95/100 mm (APEX / VISTA / CORE)
• Lens (APEX): 6.5:1 motorised optical zoom (7 positions)
• Lens (VISTA): Low distortion telecentric lens
• Lens (CORE): 6.5:1 indexed manual optical zoom (6 positions)
• Field of view – Max: APEX 12.4 x 7.8 mm; VISTA 35 mm diagonal (28 mm / 21 mm); CORE 15.5 x 10.0 mm
• Field of view – Min: APEX 2.8 x 1.8 mm; VISTA fixed lens; CORE 2.5 x 1.5 mm
• Magnification range*: APEX 27x–117x; VISTA 10.3x; CORE 20x–117x (based on a 22" monitor, fit to screen)
• Lens control: APEX motorised zoom and focus; VISTA motorised focus; CORE manual zoom and focus
• Camera: APEX 2.3 MP (11.251 x 7.032 mm) CMOS; VISTA 5.0 MP (5.702 x 4.277 mm) CMOS; CORE 2.3 MP CMOS
• Control: APEX 3-axis CNC; VISTA 3-axis CNC; CORE Manual
• Maximum load: 10 Kg (all systems)
• Standard footprint (X / Y / Z) + PC and monitor: APEX 800 x 520 x 570 mm; VISTA 800 x 520 x 550 mm; CORE 550 x 650 x 580 mm
• Working volume X,Y,Z = PC and Monitor: APEX 1000 x 520 x 670 mm; VISTA 1000 x 520 x 620 mm; CORE 720 x 690 x 670 mm
• Encoder resolution: X,Y 1 μm; Z axis 0.5 μm
• Measurement uncertainty (X – Y axes)*: APEX 5 + (6.5L/1000) μm **; VISTA 5 + (9.54 L/1000) μm (or 4 μm in FOV mode); CORE 5 + (6.5L/1000) μm **
• Measurement uncertainty (Z axis)*: APEX 15 + (7L/1000) μm **; VISTA N/A; CORE 15 + (7L/1000) μm **
• Surface illumination: Bright white LED ring-light with 4 sectors and optional diffuser (APEX & VISTA); CORE bright white LED ring-light with diffuser
• Substage (transmitted) illumination: APEX & CORE green LED back light with iris adjustment; VISTA collimated green LED illumination
• Light control: Fully programmable across the series
• Measurement software: M3 / M-Series software and PC; supports programmed inspection, pattern recognition, structured reporting, DXF import and data export
• Software options / modules: M-Series software modules available to extend capability and create custom measurement routines
• Notes: Measurement uncertainty is determined in accordance with ISO-10360 Part 7. In uncertainty formulas L = length in mm; values assume controlled conditions at maximum magnification and the standard measuring plane.