Optical component

In the race to push the boundaries of semiconductor performance and precision, stage control structures deliver the wafer to the right place at the right time with low uncertainty. These components form the critical foundation of photolithography and inspection stage control positioning systems, where sub-nanometer level accuracy isn't a luxury, it's a necessity. Zygo™ Dynamic Stage Control Expertise • Monolithic (integrated mirrors and clamping base) Mirror Blocks • Reticle Stage & Wafer Stage Structures • Wafer clamp components • Linear Reference Mirrors for Stage Positioning • Other specialty components - Metrology Frames, Z-Mirrors and Encoder Plates Zygo has supplied the most precise lightweight optical components for stage positioning to the semiconductor industry for over 50 years. Each component is critical to maintain dimensional stability under extreme acceleration, wide thermal range, vacuum compatibility, and can be tailored for application-specific usage. The integrity of these structures directly impacts overlay accuracy, throughput, and yield—making them indispensable to semiconductor manufacturing. At the heart of every successful semiconductor tool lies a commitment to dimensional perfection, material science and repeatable performance. That’s why leading semiconductor OEMs have trusted Zygo with the most critical and demanding precision structure requirements. Zygo’s ability to scale our manufacturing process from prototype to full rate production is what sets us apart. Our depth of engineering knowledge and decades of manufacturing experience with a wide range of optical materials and coatings make Zygo an ideal partner for your most challenging cost and performance requirements. Low Coefficient of Thermal Expansion (CTE) Glass Ceramics • Zerodur® • ULE® • ClearCeramZ™ Ceramics • Cordierite • Silicon Carbide • Alumina Zygo meets our customers at their point of need, whether it's build to print or design to spec. Our team supports design for manufacturability and guides customers through material tradeoffs to ensure we get the job done right the first time Zygo is also unique in our ability to manufacture stage control components in sizes up to 1.25m with nanometer precision.