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SKF positioning systems designed a series of compact cross tables that are driven with ironless linearmotors. High guiding / positioning accuracy and high dynamic lead to a perfect solution for wafer measurement. The free area through the whole unit optimizes the mounting position of the measurement device.
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All XY Stages have a flat assembly height of less than 50 mm and a free aperture for applications with transmitted light, aperture which can be closed by an insert plate. The user can choose between continuously adjustable hall and mechanical limit switches. Even when using complete travels, all mechanical parts are protected against dirt. Basic components such as base plate and carriage are made of high-strength aluminium. A black anodized coating protects the surface and makes it reflection-poor for all applications in the field of photonics. Optionally, the XY Stages for the Life Science field are available as light anodized versions. Thus, smallest samples or impurities on the surface are easily visible.
The XY Stages are available with travels of 50, 70, 100 and 130 mm. The dimensions of the square aperture correspond to the travels of the XY Stages respectively. Powerful step and DC servo motors are used as drives. All versions of the XY Stages can be mounted to complete systems together with the new position controls PS 30 and PS 90 as well as the comfortable operating interface OWISoft. |
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XY Stage - LXYM15 series
A 2 axis XY moving coil stage of open frame construction. This actuator is intended for use in applications where it is necessary to move a sample over an optical inspection device and view through the sample. Utilising standard, proven SMAC components the XY stage provides accurate positioning capability at superior speed to alternative motorised devices. Positioning across the entire range of movement (15mm) is achievable in less than 100ms. Precision guiding systems, strategically positioned relative to the stage insert, ensure flatness across the system.
Standard and custom mounting features and inserts can be configured to suit the user's application.
XY Linear Stroke: 15mm
Encoder Resolution: 5, 1, 0.5 micron
Dimensions: 230 x 242.5 x 55mm
Repeatability: ± 1 encoder count |
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Leading the World with nano-precision XY planar air bearing systems. ALIO has also developed several air bearing systems for linear, rotary and our patent pending X-Y Planar System.
ALIO linear air bearing systems utilize dovetail and custom designs to exceed nano precision applications.
Linear Dovetail Air Bearings Systems using NewWay Dovetail Bearings. These systems are available with ceramic servo motors or ironless cogless linear servo motors depending on your application needs.
- Up to 600 mm standard dovetail
- Custom systems up to 3 meters
- Linear Motor or Ceramic Servo Motors
- Class 1 Clean Room compatible
- Standard flatness of 0.25 microns per 25 mm of travel |
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NTI high performance Open Frame Scan Heads offer the system engineer a faster design solution for X/Y scanning. These modules ease manufacturing issues by reducing the need for specialized tooling and highly skilled assemblers. NTI heads arrive optically aligned, electrically match tuned and ready to bolt up, plug in and operate in a laser system. The heads can be configured for a variety of applications using different apertures, scan angles and wavelengths. They are available with several electrical interface options and world-class control software.
NTI heads feature our fast, accurate, low drift galvanometers for superior performance. Galvanometer mounting geometry and mirror designs have been optimized to minimize mirror inertia and maximize speed. For applications which require extra long-life or high resolution, bitmaps or raster scanning, NTI can configure a scan head with long-life flexure suspension galvanometers. |
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The piezoelectric stage XY200M is based on the APA200M actuators and posseses a high stiffness. Applications include mask positioning, atomic force or scanning tunneling microscopes and optical tweezer.
Max No-load displacement (µm): 180
Dimensions (mm): 18*100*100
Resolution (nm): 1,8
Unloaded resonance frequency (Hz): 550 |
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The piezoelectric stage XY25XS is based on the APA25XS actuators. The compact XY25XS stage is well suited to integrated devices for fiber positioning, lens and CCD micro scanning.
Max displacement (µm): 20;
Dimensions (mm): 18*50*50;
Unloaded resonance frequency (Hz): 2200
Mechanisms
Mainly based on the APA concept, the CEDRAT Group has developed different mechanisms in order to fulfill its customers' requests for several degrees of freedom kinematics. These mechanisms take advantages of the APA concept offering a reliable, robust, precise and compact solution to the users.
These Standard mechanisms are currently available in order to meet various needs in terms of kinematics and force |
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You can make XY and XZ motion by joining two linear UniSlide Assemblies with adapter plates. Thousands of combinations can be made like this.
However, if you want large base and/or work plates, and your travel is relatively short, we also offer three Series (groups) of XY table packages.
Each Series comes in multiple lengths.
Options include center windows, mechanical and optical position measurement by using engrave knobs or optical or rotary encoders; optional finishes, locking screws and more.
Some of these tables are also available as motor driven units.
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Cross slides (XY stage):
Dovetail slides and roller bearing slides can be mounted to cross slides. |
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Cross table with a large working range.
Stepper Motor Controller integrated.
Plug an play capability, easy to operate.
Application:
Positioning stages for measurement and analytical systems
Technical data:
Working range (X / Y): .....450 x 390 mm
Size: (HxBXW): ................126 x 640 x 580 mm
Drive system:....................Stepper Motor ( Pollux Controller)
Measurement system: .....optical or. magnetically
Limits: .......................... ...precise Hall limit switches
Host Interface: ................ RS-232 / CAN-Bus
Power: .............................24V
Velocity: ...........................up to 80mm/s
Acceleration: ....................up to 250mm/s²
Resolution: ......................1µm
Repeatability: ..................+/- 3µm
Accuracy: .........................+/- 20µm
Weight: ...........................16 kg |
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Extremely versatile, the X/Y Table workstations are excellent for general-purpose applications and job shops. Featuring a X/Y table with up to 18" of travel, this rugged workstation features an all-welded steel tubing construction with sheet metal skin. The X/Y table workstation is ideal for processing larger parts or trays of parts.
This workstation can integrate any laser system producing any wavelength, giving the operator the ability to mark any type of material. |
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