Air bearing XY stage
IntelLiDrives, Inc.
Key Features:
· Mounted face up or inverted
· Air bearings XY table
· Large travel area
· IntelLiCoder Linear Feedback
· XY Theta control is possible
· Lightweight platen construction
· Overlapping trajectories with multiple forcers
IntelLiDrives Planar XY table offers the unique capability to operate two axes of motion in one plane with one motor. These systems designed to replace conventional compounded XY table systems where one axis is being carried by another. As a result, with Planar XY table greater reliability and performance is realized through design simplification and elimination of wear-prone components.
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