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Speed: 9 m/s
Repeatability: 5 µm
MPL Linear motor stage with air bearing Information of this linear motor stage with air bearing Capacities of this linear axis: Measuring ...
Speed: 200 mm/s
... This Z-θ stage utilizes 2-axis Planar and air bearing technologies. The drive, bearings and feedback are totally non-contact. The RotoLinear Stage has ...
Speed: 100 mm/s
... This Z-θ stage utilizes 2-axis Planar and air bearing technologies. The drive, bearings and feedback are totally non-contact. The RotoLinear Stage has ...
Planar XY Table consists of moving element called forcer which glides on the frictionless air bearings over the special "waffle-like "surface called platen. Planar forcer contains two or four linear ...
Stroke : 12 mm - 320 mm
This platform is a hybrid planar mechanical/air bearing platform dedicated to step and scan applications. It is a 6 axes platform moving in X, Y, Z and Theta directions. Dynamic flatness over the full ...
Stroke : 500, 1,000, 1,500, 2,000 mm
Speed: 1,210, 790, 2,060, 1,630 mm/s
The LA340 linear stage, with a width of 340 mm, is based on a granite plate and was constructed with air bearings. This allows it to be used for all applications that require perfect ...
Stroke : 385 mm
Speed: 330 mm/s
Repeatability: 0.3 µm - 0.4 µm
Scanning stage with large aperture This large precision xy stage is designed for maximum repeatability. Accuracy can be achieved with compensation in a cost-saving manner, which is otherwise only reserved ...
Stroke : 350 mm
Speed: 200 m/s
Repeatability: 0.3 µm - 0.4 µm
... inspection, measuring systems, automatic optical inspection (AOI), measuring devices, differential measurement, replacement for air bearing systems
... low-profile rotation stages of the PIglide RL series are designed for the highest precision with low-profile design.Various options can be combined to create a solution ideal for point-to-point indexing or constant velocity ...
Physik Instrumente
Stroke : 50, 100, 25, 150 mm
Speed: 300 mm/s
Repeatability: 50, 100 nm
ABL1000 series stages are the highest performance miniature air-bearing stages available. They are ideal for space-constricted applications where ultra-precise positioning ...
Aerotech
Speed: 200 mm/s
A-523 is an air bearing Z tip/tilt stage with direct drive. Designed as a parallel-kinematic multi-axis system, the platform can be used for Z and tip/tilt motion. This stage ...
Stroke : 5 mm
Speed: 10 mm/s
Load: 10 kg
... ± 1.5 μrad enables very precise alignment of the substrate. The Z-axis is secured against rotation via 2 air bearing pads and is dynamically driven by 2 opposing voice coils. An air-bearing ...
... gear drive with servo drive RT-1500 With servo drive. Air bearing in axial direction. Base plate and rotary table are of natural hardstone, granite. Due to automatic regulation, the air ...
Johann Fischer Aschaffenburg
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