Translation positioning stage INV

XYZmulti-axisfrictionless guided

Overview
Innovacera’s Ultra-Precision Ceramic Air-Bearing Multi-Axis Motion Platform uses high-purity alumina ceramic for its core guideway and precision datum components. Combined with aerostatic air-bearing support, a multi-axis motion architecture, and configurable drive and position feedback systems, it provides a stable and smooth motion foundation for precision inspection, optical scanning, semiconductor equipment and automation systems.

Operation
During operation, filtered compressed air forms a uniform air film between the air bearings and the ceramic guide surfaces, allowing the moving components to operate without direct mechanical contact. Compared with conventional rolling guideways, the air-bearing structure reduces friction, low-speed stick-slip, mechanical wear, and lubrication-induced disturbances, helping improve continuous scanning smoothness, velocity consistency and repeatable motion performance.

Manufacturing & Precision
The core ceramic components can be precision ground, lapped and polished to control flatness, parallelism, perpendicularity, surface roughness and critical mounting datums. Platform dimensions, axis configurations, mounting holes, pneumatic interfaces, and drive and feedback interfaces can be customized to suit available equipment space and motion requirements.

Product Features

• Non-contact air-bearing motion
• High-purity alumina ceramic guideway and datum surfaces
• Micron-level geometric accuracy control
• Smooth scanning and stable velocity control
• Supports long-term accuracy retention
• Suitable for clean and low-contamination environments
• Configurable multi-axis architecture

Specifications
Platform Series | Size Class | Flatness | Parallelism | Perpendicularity | Remarks
INV Series | 600 Series | 2 μm | 2 μm | 2 μm | Customized
INV Series | 800 Series | 2 μm | 2 μm | 2 μm | Customized
INV Series | 1200 Series | 2 μm | 2 μm | 2 μm | Customized

Typical Applications
Precision Metrology and Inspection Equipment
Used as a motion module for precision dimensional inspection, surface profile measurement, non-contact measurement, probe scanning, and coordinate measuring machines (CMM).

Semiconductor and Wafer Inspection
Used for wafer inspection, substrate scanning, photomask inspection, package inspection, and precision positioning and handling platforms in semiconductor equipment.

Optical and Photonics Systems
Used for beam alignment, lens inspection, interferometric measurement, fiber coupling, optical component scanning, and photonic device assembly and alignment.

Laser Processing and Micro/Nanofabrication
Used in laser cutting, laser marking, micromachining, precision exposure, and other processing systems that require stable scanning velocity.

Display Panel and Electronics Inspection
Used for scanning, inspection, and positioning of glass substrates, display panels, PCBs, and precision electronic components.

Automated Assembly
Used in high-precision dispensing, placement, alignment, pick-and-place, assembly and in-line inspection equipment.

Technical Specifications

• Material: High-purity alumina ceramic (Al2O3) for guideways and precision datum components
• Bearing type: Aerostatic (air) bearings forming a uniform air film for non-contact motion
• Geometric accuracy: Flatness, parallelism and perpendicularity controlled to ≤ 2 μm (per table for INV Series 600/800/1200)
• Series / Size classes: INV Series — 600, 800, 1200 Series (customizable)
• Surface treatment: Precision grinding, lapping and polishing to control surface roughness and datums
• Motion architecture: Configurable multi-axis (X/Y/Z/θ) platforms
• Performance: Smooth scanning, stable velocity control, low friction, reduced stick-slip and wear
• Environment: Suitable for clean and low-contamination environments
• Customization: Platform dimensions, travel/stroke, mounting hole patterns, pneumatic interfaces, drive and feedback interfaces can be tailored