C.Application cases of ion implanter accessories and ceramic accessories
1. Ion implanter component case
Application examples of ion implanter accessories include the manufacture of key components of ion implanters, such as bearings, vacuum suction cups, electrostatic chucks, nozzles, filaments, cathode modules, etc. Due to their high hardness, high strength and high heat resistance, ceramic accessories are able to improve the performance and reliability of ion implanters.
2. Semiconductor manufacturing equipment case
Ion implanter partsExamples of semiconductor manufacturing equipment for ceramic accessories include the key components for manufacturing semiconductor manufacturing equipment, such as packaging substrates, insulating materials, etc. Due to their excellent electrical insulation and chemical stability, ceramic accessories can ensure long-term stable operation of semiconductor manufacturing equipment in harsh environments.