Rotary positioning stage A-63x PIglide RL series

motorizedmulti-axisprecision

motion platform diameter Low profile Eccentricity and flatness < 100 nm Option for self-locking at rest by magnetic preload Product overview The directly driven low-profile rotation stages of the PIglide RL series are designed for the highest precision with low-profile design. Various options can be combined to create a solution ideal for point-to-point indexing or constant velocity scanning. The RL stages offer superior travel accuracy, flatness, and wobble performance. 3-Phase torque motor Brushless Slotless Low cogging torque Absolute encoder (optional) Absolute encoders supply explicit position information that enables immediate determination of the position. This means that referencing is not required during switch-on, which increases efficiency and safety during operation. Accessories and options Incremental or absolute encoder Vacuum feedthrough Self-locking at rest by magnetic preload Clear aperture on request PIglide filter and air preparation kit Single or multi-axis motion controllers and servo drives Multi-axis/customized setups Base plates made of granite and systems for reducing vibration Application fields Optical alignment, wafer inspection, wafer alignment, measuring technology, inspection systems, calibration, scanning. Thanks to the friction-free motion, no particles are formed, which makes PIglide stages ideal for cleanroom applications.