Rotary stage A-68 series

motorizedmulti-axisprecision

• 365 mm diameter motion platform, 260 mm diameter aperture • Eccentricity and flatness < 300 nm Product overview The directly driven rotation stages of the PIglide RLA series are designed for ultra-high precision. They have a low profile and a large clear aperture. The RLA stages offer a superior travel accuracy, flatness, and wobble performance. 3-Phase torque motor Brushless Low cogging torque Absolute encoder (optional) Absolute encoders supply explicit position information that enables immediate determination of the position. Therefore, no referencing is necessary when switching on and this increases efficiency and safety during operation. Accessories and options Incremental or absolute encoder PIglide filter and air preparation kits Single or multi-axis motion controllers and servo drives Multi-axis/customized setups Base plates made of granite and systems for reducing vibration Application fields Tomography, beamline systems, wafer metrology, wafer inspection, measuring technology, inspection systems, calibration, scanning. Thanks to the friction-free motion, no particles are formed, which makes PIglide stages ideal for cleanroom applications.