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XY stage XY-OF-UL-200x200+ACR160UTrotary2-axisopen-frame
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Characteristics
- Orientation
- XY, rotary
- Number of axes
- 2-axis
- Other characteristics
- open-frame, for wafer handling
- Stroke
200 mm
(7.874 in)- Speed
400 mm/s, 800 mm/s
Description
Open-frame XY-Rotary stages designed with a low profile for wafer handling and many other automated accurate positioning applications in semiconductor manufacturing industries. XY drive mechanism located on the side of the unit and large center hole-through rotary table offer a clear unobstruced access to the wafer.
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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.